Palladium sputtering targets share common properties with their raw materials. Palladium is a silvery-white transition metal that is soft, has good ductility and plasticity,
and can be forged, rolled and drawn. It has a face-centered cubic crystal structure and is highly resistant to air corrosion and acid action at room temperature.
It is attacked by hot acids and is soluble in aqua regia. It forms many compounds and several complex salts. Palladium has good corrosion resistance but is soluble in
oxidizing acids and molten alkalis. It easily absorbs hydrogen (900 times its own volume), but its main use is as a hydrogenation catalyst.
Palladium target material preparation process
Material preparation - vacuum induction melting - annealing - rolling - stamping - metallographic inspection - machining - dimension inspection
- cleaning - inspection - packaging
Main products of palladium:
1. Palladium particles with a purity of 99.99%; regular size φ3*6mm; used for thermal evaporation and electron beam evaporation; can be customized
2. Palladium target material with a purity of 99.99%; regular size φ50*1mm; φ60*3mm; φ76.2*4mm, etc.; used for magnetron sputtering coating; Size can be customized
3. Electron microscope palladium sheet, regular size: φ57*0.1mm; φ57*0.2mm; φ58*0.1mm; φ58*0.2mm, used for electron microscope SEM equipment
4. Palladium foil purity 99.99%, regular size 100*100*0.2mm, etc.; size can be customized
Application of palladium sputtering target
High-performance palladium sputtering target can be used for thin film coating, CD-ROM, decoration, flat panel display, functional coating, and other
optical information storage space industries, glass coating industries such as automotive glass and architectural glass, optical communications, etc.
Other major applications of palladium metal include use as catalytic converters, key catalysts in polyester production, elimination of harmful emissions from
internal combustion engines, purification of nitric acid, and development of raw materials for synthetic rubber and nylon.